SP Series

Induction Heated Furnace
for Silicon Carbide with Process Technology

•  Fully automated, turnkey furnace with processes available for maximum productivity

•  The growth process begins with push button loading starts automated process

•  The growth process can also be operated in manual mode for R&D purposes

•  Two Models:        

               o SP-100: 100mm

               o SP-150: 150-200mm

•  SP-150 is the first 200mm (8”) capable furnace sold commercially

•  Coil movement during growth as low as 20μm per step

•  Base pressure of 10-7 mbar for the best purity, repeatability and quality

•  User-friendly proprietary Aymont automated PLC control with recipes, color touch    screen and safety interlocks/alarms

•  Crucible rotation at 0.5 to 20 RPM for maximum uniformity and repeatability

•  Process can be operated using simple or complex power control, or temperature    control using two-color pyrometers

•  Device-quality and thick crystals with optional process demonstration